Highly Parallel Wafer-Level-Reliability Systems with Modular SMUs

WLR systems, which have been around for decades, vary in both measurement capability and architecture. Specialized WLR systems may involve high-frequency ac or pulsed stimulus. However, most CMOS devices are tested with dc instruments such as source measure units (SMUs), which supply the necessary stress and measurement capability for collecting parametric data.
Author(s):  Harnack, Jake
Issue:  KIPiS 2016 #6